TWI673223B

Provided is a vacuum suction manipulator, comprising a suction shaft (031), a suction head (07), a main body support (01), a driving assembly and an anti-rotation structure, wherein the suction shaft (031) is connected to the anti-rotation structure; the driving assembly is used for driving the suction shaft (031) and the anti-rotation structure to slide in an axial direction in the main body support (01); the anti-rotation structure is used for preventing the suction shaft (031) from rotating around the axial direction relative to the main body support (01); a top end of the suction shaft (031) is connected to the suction head (07); a vacuum channel is arranged in the suction shaft (031); and the suction head (07) is in communication with the vacuum channel. Further provided is a substrate transfer device comprising the vacuum suction manipulator, and a photoetching machine. The substrate transfer device improves the space utilization thereof and reduces the spatial size thereof. The present invention uses a