TWI672212B

A flexible mold has a mold body having a nanoimprinting microstructure and is gradually thickened from its periphery to the middle. Also, a resist spreading nanoimprinting method that integrates a soft mold into a dovetailed meal ring and then deforms it to form a point contact with a substrate befo...

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Bibliographische Detailangaben
Hauptverfasser:	LI, YONGUN, HUANG, SHAO-XUAN, LU, KE-QUAN, CAI, YI-JUN, WU, JUN-YING, SU, WEI-XIANG
Format:	Patent
Sprache:	chi
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	A flexible mold has a mold body having a nanoimprinting microstructure and is gradually thickened from its periphery to the middle. Also, a resist spreading nanoimprinting method that integrates a soft mold into a dovetailed meal ring and then deforms it to form a point contact with a substrate before an imprinting process is followed and then convert a loading force into a specific distributed contact pressure for driving the resist flow by using an elastomer cushion pad with a pre-designed convex surface.