Method and station for treatment of a plastic transport box for conveyance and atmospheric storage of substrates

A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at l...

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Bibliographische Detailangaben
Hauptverfasser: LE GUET, CATHERINE, PALISSON, JULIEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.