Polymer, organic layer composition, and method of forming patterns

The present invention provides a polymer comprising a structure unit represented by chemical formula 1 below and a structure unit represented by chemical formula 2 below, an organic layer composition comprising the polymer, and a method for forming patterns using the organic layer composition. In th...

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Hauptverfasser: RATHWELL, DOMINEA, KWON, HYO YOUNG, JUNG, HYEONIL, HEO, YUMI, NAMGUNG, RAN, MUN, SOOHYOUN, SONG, HYUNJI, NAM, YOUNHEE
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creator RATHWELL, DOMINEA
KWON, HYO YOUNG
JUNG, HYEONIL
HEO, YUMI
NAMGUNG, RAN
MUN, SOOHYOUN
SONG, HYUNJI
NAM, YOUNHEE
description The present invention provides a polymer comprising a structure unit represented by chemical formula 1 below and a structure unit represented by chemical formula 2 below, an organic layer composition comprising the polymer, and a method for forming patterns using the organic layer composition. In the chemical formula 1 and 2, A1 and A2 are each independently a divalent group comprising at least one substituted or unsubstituted benzene ring, A3 is a divalent group each containing a quaternary carbon and a ring, symbol * is a point of connection.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
MATERIALS THEREFOR
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
title Polymer, organic layer composition, and method of forming patterns
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