Substrate peeling device, and substrate peeling method

A substrate peeling device and a substrate peeling method capable of peeling the resin substrate from the support body well are provided. A substrate peeling device is a substrate peeling device of peeling off the resin substrate of which the plane shape is a rectangle formed on the support body, in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKASE, SHINJI, MASU, YOSHIAKI, KIKUCHI, HIROYUKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A substrate peeling device and a substrate peeling method capable of peeling the resin substrate from the support body well are provided. A substrate peeling device is a substrate peeling device of peeling off the resin substrate of which the plane shape is a rectangle formed on the support body, including: at least a corner portion arranged at the resin substrate and insertion portions capable of being inserted into the interface between the corner portion and the resin substrate; a moving mechanism relatively moving the insertion portion and the support body under condition of inserting the insertion portion into the interface; and a peeling mechanism retaining the resin substrate and peeling the resin substrate from the support body using a slit that is formed at the interface by the insertion portion as a base point.