Substrate peeling device, and substrate peeling method
A substrate peeling device and a substrate peeling method capable of peeling the resin substrate from the support body well are provided. A substrate peeling device is a substrate peeling device of peeling off the resin substrate of which the plane shape is a rectangle formed on the support body, in...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A substrate peeling device and a substrate peeling method capable of peeling the resin substrate from the support body well are provided. A substrate peeling device is a substrate peeling device of peeling off the resin substrate of which the plane shape is a rectangle formed on the support body, including: at least a corner portion arranged at the resin substrate and insertion portions capable of being inserted into the interface between the corner portion and the resin substrate; a moving mechanism relatively moving the insertion portion and the support body under condition of inserting the insertion portion into the interface; and a peeling mechanism retaining the resin substrate and peeling the resin substrate from the support body using a slit that is formed at the interface by the insertion portion as a base point. |
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