Substrate processing management device, substrate processing management method and substrate processing management computer program product

History display data is acquired for displaying a history of processing of a plurality of substrates in a substrate processing device. On the basis of the acquired history display data, the history of the processing of the plurality of substrates is displayed by a display unit as a history chart. If...

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Bibliographische Detailangaben
Hauptverfasser: NAKANISHI, AKIHIRO, JO, KENICHIRO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:History display data is acquired for displaying a history of processing of a plurality of substrates in a substrate processing device. On the basis of the acquired history display data, the history of the processing of the plurality of substrates is displayed by a display unit as a history chart. If, as arbitrary portions of the history chart which is displayed by the display unit, a plurality of elements which correspond both to different substrates and to the same process are accepted as a first and second element, first or secondary additional lines are displayed upon the history chart as traversing the portions which mutually correspond to the accepted first and second elements.