Probe card

Provided is a probe card capable of preventing slippage of needle front when contacting with an object-to-be-measured, and having stable contact resistance. A probe card 10 has a substrate 12, a guide plate 14 having a plurality of circular through holes 18 penetrating perpendicularly to a plate sur...

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Bibliographische Detailangaben
Hauptverfasser: IWASHITA, NAONORI, SENOUE, YASUFUMI, MIYAMOTO, DAISUKE, MORIYAMA, MITSUHIRO, NAKAMURA, HIROYUKI, NISHIDA, SATOSHI, NISHIJIMA, TERUHIKO, HONDA, HIDEKAZU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided is a probe card capable of preventing slippage of needle front when contacting with an object-to-be-measured, and having stable contact resistance. A probe card 10 has a substrate 12, a guide plate 14 having a plurality of circular through holes 18 penetrating perpendicularly to a plate surface, and a plurality of needles 16 having one end connected to a needle connection portion 20 of the substrate 12 and the other end, which extends toward a central side of the substrate 12 via a needle middle fixing portion 22, connected to a pad of an object-to-be-measured, with the same diameter over the whole length except a portion of the needle connection portion at the one end and a portion of the contacting end at the other end. Each needle 16 includes a beam 24 fixed by the needle middle fixing portion 22 and sticking-out from a central-side end surface thereof, and a needle front 26 with a portion having the same diameter bending from a front end of the beam 24 in a direction perpendicular to the guide pl