SYSTEM,METHOD,AND COMPUTER-READABLE MEDIUM FOR TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY

SYSTEM,METHOD,AND COMPUTER-READABLE MEDIUM FOR TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY

Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more...

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Bibliographische Detailangaben
Hauptverfasser: WOLFE, ORION, PATEL, SUKESH JANUBHAI, POLAK, WOLFGANG, KAUSHAL, SANJEEV
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Beschreibung
Zusammenfassung:Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signature dataset and at least one other signature dataset associated with the at least one previously determined tool failure.