Optimisation of the beam distribution of a radiation source

The invention relates to a radiation source including: an illuminant; a first optical element; and a sensor. The sensor is designed appropriately and is connected to the first optical element appropriately such that the sensor can be used to determine a change of a parameter of the first optical ele...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BREGA, ENRICO, PEIL, MICHAEL, GOLD, PETER, STRAUSS, JAN, MEYER, STEFAN, RUETH, CHRISTIAN, HOFMANN, MARKO, DIETTRICH, JOERG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a radiation source including: an illuminant; a first optical element; and a sensor. The sensor is designed appropriately and is connected to the first optical element appropriately such that the sensor can be used to determine a change of a parameter of the first optical element over time, whereby the parameter affects an optical property of the radiation source. Moreover, the invention relates to a method for the producing a product involving the provision of a radiation source according to the invention as well as to a use of the radiation source to increase the efficiency of conversions or changes of state of educts to products.