Optical sensor assembly for inspecting knife and apparatus for cutting substrate including the same

The invention provides an optical sensor assembly for checking cutters and a device including the same for cutting a substrate. In one aspect of the invention, the device for cutting the substrate comprises at least one cutter used for cutting the substrate and at least one optical sensor which chec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MOON, SU RYONG, KWEON, JIN KEON, HEO, KYUNG HOE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention provides an optical sensor assembly for checking cutters and a device including the same for cutting a substrate. In one aspect of the invention, the device for cutting the substrate comprises at least one cutter used for cutting the substrate and at least one optical sensor which checks whether the cutter has defects by enabling light to irradiate a cutting edge of the cutter.