Process for producing semiconductive indium oxide layers, indium oxide layers prepared by the process and use thereof

The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising a) at least one indium alkoxide and b) at least one solvent, optionally dried and thermally treated at temperatures greater than...

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Bibliographische Detailangaben
Hauptverfasser: HOPPE, ARNE, STEIGER, JUERGEN, MERKULOV, ALEXEY, THIEM, HEIKO, PHAM, DUY VU, DAMASCHEK, YVONNE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising a) at least one indium alkoxide and b) at least one solvent, optionally dried and thermally treated at temperatures greater than 250° C., to the layers producible by this process, and to the use thereof.