Clean air blower unit
PURPOSE: A cleaned air blower unit capable of cleaning of a substrate accommodation unit is provided to flow cleaned air from a blower side to a discharge side and to favorably clean a substrate accommodation unit. CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arrang...
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| creator | NAKAO, TATSUO |
| description | PURPOSE: A cleaned air blower unit capable of cleaning of a substrate accommodation unit is provided to flow cleaned air from a blower side to a discharge side and to favorably clean a substrate accommodation unit. CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arranged to have a parallelopipedon shape substrate load unit accommodating a substrate by having an up and down distance from a substrate(1). A substrate load unit performs load and unload of a substrate with respect to the substrate accommodation unit. A storage unit includes a return unit returning a substrate accommodation unit. A pair of shielding plates(10) covers the two sides of the four sides of the substrate accommodation unit except for the blower side and the discharge side. A cleaned air blower unit further includes a discharge plate(13) covering the discharge side. An insertion hole(Q) inserting a substrate in formed in a facing position or in a lower side than the facing position facing the substrate in th |
| format | Patent |
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CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arranged to have a parallelopipedon shape substrate load unit accommodating a substrate by having an up and down distance from a substrate(1). A substrate load unit performs load and unload of a substrate with respect to the substrate accommodation unit. A storage unit includes a return unit returning a substrate accommodation unit. A pair of shielding plates(10) covers the two sides of the four sides of the substrate accommodation unit except for the blower side and the discharge side. A cleaned air blower unit further includes a discharge plate(13) covering the discharge side. An insertion hole(Q) inserting a substrate in formed in a facing position or in a lower side than the facing position facing the substrate in th</description><language>chi ; eng</language><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR ; AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING ; BASIC ELECTRIC ELEMENTS ; BLASTING ; CLEANING ; CLEANING IN GENERAL ; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; PACKAGES ; PACKAGING ELEMENTS ; PACKING ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; RANGES ; SEMICONDUCTOR DEVICES ; STORING ; TRANSPORTING ; VENTILATING ; WEAPONS</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171011&DB=EPODOC&CC=TW&NR=I601918B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20171011&DB=EPODOC&CC=TW&NR=I601918B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NAKAO, TATSUO</creatorcontrib><title>Clean air blower unit</title><description>PURPOSE: A cleaned air blower unit capable of cleaning of a substrate accommodation unit is provided to flow cleaned air from a blower side to a discharge side and to favorably clean a substrate accommodation unit. CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arranged to have a parallelopipedon shape substrate load unit accommodating a substrate by having an up and down distance from a substrate(1). A substrate load unit performs load and unload of a substrate with respect to the substrate accommodation unit. A storage unit includes a return unit returning a substrate accommodation unit. A pair of shielding plates(10) covers the two sides of the four sides of the substrate accommodation unit except for the blower side and the discharge side. A cleaned air blower unit further includes a discharge plate(13) covering the discharge side. 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CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arranged to have a parallelopipedon shape substrate load unit accommodating a substrate by having an up and down distance from a substrate(1). A substrate load unit performs load and unload of a substrate with respect to the substrate accommodation unit. A storage unit includes a return unit returning a substrate accommodation unit. A pair of shielding plates(10) covers the two sides of the four sides of the substrate accommodation unit except for the blower side and the discharge side. A cleaned air blower unit further includes a discharge plate(13) covering the discharge side. An insertion hole(Q) inserting a substrate in formed in a facing position or in a lower side than the facing position facing the substrate in th</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| source | esp@cenet |
| subjects | ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING CLEANING CLEANING IN GENERAL CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HEATING LIGHTING MECHANICAL ENGINEERING PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL RANGES SEMICONDUCTOR DEVICES STORING TRANSPORTING VENTILATING WEAPONS |
| title | Clean air blower unit |
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