Clean air blower unit

PURPOSE: A cleaned air blower unit capable of cleaning of a substrate accommodation unit is provided to flow cleaned air from a blower side to a discharge side and to favorably clean a substrate accommodation unit. CONSTITUTION: A cleaned air blower unit(J) is detachably installed while being arranged to have a parallelopipedon shape substrate load unit accommodating a substrate by having an up and down distance from a substrate(1). A substrate load unit performs load and unload of a substrate with respect to the substrate accommodation unit. A storage unit includes a return unit returning a substrate accommodation unit. A pair of shielding plates(10) covers the two sides of the four sides of the substrate accommodation unit except for the blower side and the discharge side. A cleaned air blower unit further includes a discharge plate(13) covering the discharge side. An insertion hole(Q) inserting a substrate in formed in a facing position or in a lower side than the facing position facing the substrate in th