METHOD FOR ANALYZING SEMICONDUCTOR FABRICATION FAULT AND COMPUTER PROGRAM
A method for analyzing semiconductor fabrication fault divides process record of workpieces into a group of good products and a group of good and bad products, calculate feature value of each group, and then determines a feature weight according to the feature values of the two groups to filter out...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A method for analyzing semiconductor fabrication fault divides process record of workpieces into a group of good products and a group of good and bad products, calculate feature value of each group, and then determines a feature weight according to the feature values of the two groups to filter out process parameters which may cause defects. |
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