METHOD FOR ANALYZING SEMICONDUCTOR FABRICATION FAULT AND COMPUTER PROGRAM

A method for analyzing semiconductor fabrication fault divides process record of workpieces into a group of good products and a group of good and bad products, calculate feature value of each group, and then determines a feature weight according to the feature values of the two groups to filter out...

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Bibliographische Detailangaben
Hauptverfasser: CHANG, FENG-RUEI, JIANG, MON-FONG, DU, YU-HSUAN, FAN CHIANG, KUAN-YU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A method for analyzing semiconductor fabrication fault divides process record of workpieces into a group of good products and a group of good and bad products, calculate feature value of each group, and then determines a feature weight according to the feature values of the two groups to filter out process parameters which may cause defects.