TWI586906B

Provided are a portable rotary apparatus and a film formation apparatus, with which it is possible to accomplish substrate film formation through a simple procedure employing planetary gear rotation. This portable rotary apparatus (11) is configured from: a rotating dome (21) rotated by a servomotor (M) that is provided to a vacuum deposition apparatus (1); a substrate holder (12) which is rotatably supported on the rotating dome (21), and onto which a film formation substrate (14) is placed; an inner frame (11a) attached to the rotating dome (21) with a revolving gear bearing interposed therebetween; an outer frame (24) arranged outside of the inner frame (11a), and formed so as to mesh with the outer peripheral side of the substrate holder (12); and a linking arm (41) for linking the inner frame (11a) and the outer frame (24). The rotating dome (21) rotates about the revolution axis (R1) of the planetary gear mechanism, and the substrate holder (12) is held in the area surrounding the revolution axis (R1) b