Electrostatically actuated micro-mechanical switching device

The present invention relates to an electrostatically actuated micro-mechanical switching device (1) with movable elements formed in the bulk of a substrate (15) for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate (15); th...

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Bibliographische Detailangaben
Hauptverfasser: KURTH, STEFFEN, AKIBA, AKIRA, LEIDICH, STEFAN, BERTZ, ANDREAS, NOWACK, MARKUS, FROEMEL, JOERG, GESSNER, THOMAS, KAUFMANN, CHRISTIAN, IKEDA, KOICHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention relates to an electrostatically actuated micro-mechanical switching device (1) with movable elements formed in the bulk of a substrate (15) for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate (15); the switching device (1) comprising: a drive with comb-shaped electrodes (2,3), wherein the electrodes (2,3) comprise fixed driving electrodes (2) and movable electrodes (3); a movable push rod (4) being mechanically connected with the movable electrodes (3) and extending through the electrodes (2,3); a movable contact element being mechanically connected with one side of the push rod (4); at least one restoring spring (5) being mechanically connected with the push rod (4); a signal line (7) and a ground line (13), wherein the signal line (7) comprises two parts (7a,7b) being interrupted by a gap (10). It is the object of the present invention to provide a micro-mechanical switching device (1) in shunt-configuration