Magnatoresistive structure and method for forming the same

A magnetoresistive structure includes a substrate and a patterned stack structure. The substrate has a back surface and a front surface having a step portion. The patterned stack structure is on the step portion of the front surface and comprises a magnetoresistive layer, a conductive cap layer and...

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Bibliographische Detailangaben
Hauptverfasser: LEE, CHIEN MIN, LIOU, FU TAI, FU, NAI CHUNG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A magnetoresistive structure includes a substrate and a patterned stack structure. The substrate has a back surface and a front surface having a step portion. The patterned stack structure is on the step portion of the front surface and comprises a magnetoresistive layer, a conductive cap layer and a dielectric hard mask layer. The step portion has a top surface parallel to the back surface, a bottom surface parallel to the back surface and a step height joining the top surface and bottom surface and being not parallel to the back surface.