Organic film forming apparatus and a method for forming an organic film

Provided are an apparatus for organic film formation and a method for organic film formation, according to which an organic material is adhered to a film-formation target, and the organic material is then hardened to form an organic film while the film-formation target is maintained in a stationary state. An organic film of a light-reactive material is formed as follows: a film-formation target (5) is disposed on a substrate stage (14) disposed in a vacuum chamber (11), a mask (31) is disposed in contact with the surface of the film-formation target (5), the film-formation target (5) is cooled, a light-reactive material which hardens when irradiated with light from above the mask (31) is emitted while the inside of the vacuum chamber (11) is evacuated, the light-reactive material attaches to the surface of the film-formation target (5) exposed at the bottom surface of an opening (34) in the mask (31), a liquid film of the light-reactive material is formed in the attached portion, the evacuation of the vacuum