MANUFACTURING METHOD OF MIXED MODE MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE AND MIXED MODE MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE MADE THEREBY

Bibliographische Detailangaben

Hauptverfasser:	KANG, YU FU, LO, CHIUNG CHENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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