Vertical dmos transistor

A transistor includes a semiconductor body; a first gate electrode formed on a first portion of the semiconductor body and a second gate electrode formed on a second portion of the semiconductor body. A drain region is formed on a first side of the first gate electrode and a first source region is f...

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1. Verfasser: HIDEAKI, TSUCHIKO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A transistor includes a semiconductor body; a first gate electrode formed on a first portion of the semiconductor body and a second gate electrode formed on a second portion of the semiconductor body. A drain region is formed on a first side of the first gate electrode and a first source region is formed on a second side of the first gate electrode. The drain region is formed on a first side of the second gate electrode and a second source region is formed on a second side of the second gate electrode. A trench is formed in the semiconductor body and positioned in the drain region. A doped sidewall region is formed in the semiconductor body along the sidewall of the trench outside of the trench. The doped sidewall region is in electrical contact with the drain region and forms a vertical drain current path for the transistor.