Dry vacuum pump apparatus, exhaust unit, and silencer
A dry vacuum pump apparatus includes a silencer, which can be reduced in size, for effectively reducing noise of a gas discharged from a final outlet port and an intermediate release outlet port of a dry vacuum pump, in a wide range of frequencies from low to high frequencies. The dry vacuum pump ap...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A dry vacuum pump apparatus includes a silencer, which can be reduced in size, for effectively reducing noise of a gas discharged from a final outlet port and an intermediate release outlet port of a dry vacuum pump, in a wide range of frequencies from low to high frequencies. The dry vacuum pump apparatus includes a dry vacuum pump 10 having a final outlet port 18 and an intermediate release outlet port 19, an exhaust section check valve 51 connected to the final outlet port 18 and having an outlet port, an intermediate section check valve 52 connected to the intermediate release outlet port 19 and having an outlet port, and an exhaust passage 56 connected to the outlet port of the exhaust section check valve 51 and the outlet port of the intermediate section check valve 52, a silencer 53 connected to the exhaust passage 56 and having an outlet port connected to a final exhaust passage 56a which is vented to the atmosphere. |
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