A HETERODYNE INTERFEROMETRIC ELLIPSOMETRY BASED ON OPTICAL ADDITION AND SUBTRACTION

Bibliographische Detailangaben

Hauptverfasser:	LANG, KUO CHEN, TENG, HUI KANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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