Substrate transfer apparatus and substrate transfer method

Bibliographische Detailangaben

Hauptverfasser:	NAKAMITSU, TAKASHI, OTSUKA, YOSHITAKA, TAKAKI, TAKAO, MIYAZAKI, FUMIHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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