Substrate supporting units and substrate treating apparatuses including the same

PURPOSE: A substrate supporting unit and a substrate processing device including the same are provided to uniformly process a substrate by uniformly heating the substrate using a heating member. CONSTITUTION: A heating member includes a first hot wire(231), a second hot wire(232), and a third hot wi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, SEUNGBAE, LEE, WONHAENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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