Vacuum processing chamber suitable for etching high aspect ratio features and components of same

A coating has a cylindrical body (914) comprising upper and lower edges, and a flange extending radially outwards from the upper edge. A recess (932) is formed in an outer surface of the body. A slit (938) is arranged in the recess and passes through the body, where the body is coated by yttrium or...

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Bibliographische Detailangaben
Hauptverfasser:	ZHOU, XIAOPING, SCANLAN, DECLAN, PATERSON, ALEXANDER, PAMARTHY, SHARMA, DIETZ, JEFFREY WILLIAM, HOLLAND, JOHN P, GUTIERREZ, DAVID E, ABOOAMERI, FARID, KOOSAU, DENNIS M, DAO, HUUTRI, DINEV, JIVKO, MCDONOUGH, KELLY A, HE, ZHONGYI JIM, DESHMUKH, SHASHANK, CLARK, ROBERT S
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A coating has a cylindrical body (914) comprising upper and lower edges, and a flange extending radially outwards from the upper edge. A recess (932) is formed in an outer surface of the body. A slit (938) is arranged in the recess and passes through the body, where the body is coated by yttrium or yttrium oxide. A lip (918) extends from an inner surface of the body in a radially inward manner, where the lip has an upper surface.