Electrostatic chuck and method of manufacturing the same
The invention relates to an electrostatic chuck, comprising: a base; an amorphous first insulating layer formed on the base; an electrode layer for generating electrostatic force formed on the first insulating layer; and a dielectric layer formed on the electrode layer. Accordingly, the electrostati...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention relates to an electrostatic chuck, comprising: a base; an amorphous first insulating layer formed on the base; an electrode layer for generating electrostatic force formed on the first insulating layer; and a dielectric layer formed on the electrode layer. Accordingly, the electrostatic chuck of the present invention suppresses arcing caused by the leakage of current, and achieves improved electrical characteristics and durability. |
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