Plasma processing components, method of manufacturing the same, plasma chamber having the same, and method of increasing chamber part lifetime and reducing contamination

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Bibliographische Detailangaben
Hauptverfasser:	TAYLOR, TRAVIS R, RAMANUJAM, K. Y, SRINIVASAN, MUKUND, MIKIJELJ, BILJANA, WU, SHANGHUA, KADKHODAYAN, BOBBY
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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