TWI407821B

A wafer mounting table constituted as a ceramic heater has a power feeding terminal section for a heating element and a bonding section to a supporting member as portions which are likely to be crack starting points. The wafer mounting table is constituted to permit compressive stress to be generate...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HANADA, YOSHIYUKI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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