TWI407821B
A wafer mounting table constituted as a ceramic heater has a power feeding terminal section for a heating element and a bonding section to a supporting member as portions which are likely to be crack starting points. The wafer mounting table is constituted to permit compressive stress to be generate...
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| Format: | Patent |
| Sprache: | chi |
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| Zusammenfassung: | A wafer mounting table constituted as a ceramic heater has a power feeding terminal section for a heating element and a bonding section to a supporting member as portions which are likely to be crack starting points. The wafer mounting table is constituted to permit compressive stress to be generated in the power feeding terminal section and/or the bonding section which are likely to be the crack starting points. |
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