Structure of solar cell and its production method

A manufacturing method of an electrode of a solar cell panel of the present invention comprises the steps of providing a semiconductor substrate with an antireflection layer/a dielectric layer and a first metal layer in sequence, forming a first metal layer on the antireflection layer, projecting a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHANG, KAISHENG, OU, NAITIEN, CHEN, TIENSZU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A manufacturing method of an electrode of a solar cell panel of the present invention comprises the steps of providing a semiconductor substrate with an antireflection layer/a dielectric layer and a first metal layer in sequence, forming a first metal layer on the antireflection layer, projecting a pattern on the first metal layer by a laser beam to form a metal silicide on the semiconductor substrate in accordance with the outline of the pattern, removing the first metal layer by a chosen solution, forming a first electrode connecting to the metal silicide and exposed to a surface of the antireflection layer; and forming a second electrode on a surface of the semiconductor substrate opposite to the antireflection layer.