Method to electrodeposit metals using ionic liquid

The present invention pertains to the use of an additive selected from the group consisting of amorphous silica, graphite powder, and a mixture thereof in a process to electroplate or electropolish a metal on a substrate using an ionic liquid as the electrolyte to increase metal layer thickness. It...

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Bibliographische Detailangaben
Hauptverfasser: SPEELMAN, JOHANNA CHRISTINA, VAN STRIEN, CORNELIS JOHANNES GOVARDUS, KUZMANOVIC, BORIS, WELTER, FRANZ WINFRIED, NABUURS-WILLEMS, LAMBERDINE JOHANNA WILLEMINA MARIA
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention pertains to the use of an additive selected from the group consisting of amorphous silica, graphite powder, and a mixture thereof in a process to electroplate or electropolish a metal on a substrate using an ionic liquid as the electrolyte to increase metal layer thickness. It furthermore pertains to a method to electroplate or electropolish a metal on a metal substrate wherein an ionic liquid is employed as electrolyte, wherein a metal salt added to said ionic liquid or a metal anode is employed as metal source, and wherein said ionic liquid comprises said additive.