TWI349321B

[Problem to be solved] To provide the gas supplying and collecting unit capable of making the base-foot space become smaller. [Solution] In the gas supplying and collecting unit 1 are disposed: the first gas units 72A, 72B, 72C used to control the supply of the first gas; the second gas unit 73, which is connected to the first gas units 72A, 72B, and 72C, and utilizes a plurality of fluid controllers 31-34, 38A-43A, 38B-43B and 38C-43C to control the cleaning gas converging to the said first gas unit; and overlapping layer modules 61A, 61B, 61C, which is overlapped with the first gas unit 72A, 72B, 72C in order that parts of the fluid controllers 38A, 38B, 38C are overlapped with the overlapping layer modules 61A, 61B, 61C.