Substrate processing system, substrate processing method, verification program and computer readable recording medium recorded verification program

Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.