Capacitance acceleration sensing structure

A capacitance sensing structure includes a substrate, a sensing electrode layer, at least one stack layer and a conductive body. The sensing electrode layer is formed on or in the substrate. The stack layer is formed on the sensing electrode layer. The conductive body is disposed over and correspond...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHING, TAI KANG, LEE, CHENG CHANG, CHEN, HUANG KUN, WANG, CHAO QING, WANG, HORNG JOU, YUAN, ZONG TING, LIANG, CHAO JUI, HSIEH, HSIEH SHEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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