Capacitance acceleration sensing structure

Capacitance acceleration sensing structure

A capacitance sensing structure includes a substrate, a sensing electrode layer, at least one stack layer and a conductive body. The sensing electrode layer is formed on or in the substrate. The stack layer is formed on the sensing electrode layer. The conductive body is disposed over and correspond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHING, TAI KANG, LEE, CHENG CHANG, CHEN, HUANG KUN, WANG, CHAO QING, WANG, HORNG JOU, YUAN, ZONG TING, LIANG, CHAO JUI, HSIEH, HSIEH SHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A capacitance sensing structure includes a substrate, a sensing electrode layer, at least one stack layer and a conductive body. The sensing electrode layer is formed on or in the substrate. The stack layer is formed on the sensing electrode layer. The conductive body is disposed over and corresponding to the sensing electrode layer and the stack layer.