Method with the three dimensional outline measuring and the system of reconstruction which has a sub-pixel positing of coloring optical gratings and single monitor with main and sub-frame switching

The invention is a kind of method with the three dimensional outline measuring and the system of reconstruction which has the sub-pixel positing of coloring optical gratings and single monitor with main and sub-frame switching. The method includes pre-step; projected step; video acquired step; video...

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Bibliographische Detailangaben
Hauptverfasser: YEH, MAU-SHIUN, KU, SHIH-LIANG, LIN, CHIA-HAU, LEE, JYH-FA, LIN, CHERN-SHENG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention is a kind of method with the three dimensional outline measuring and the system of reconstruction which has the sub-pixel positing of coloring optical gratings and single monitor with main and sub-frame switching. The method includes pre-step; projected step; video acquired step; video fine tuning step; video processing step; and reconstructive step. The system includes a projected apparatus which emits the beam from the optical grating to DUT; an image from the optical grating on DUT and has the same contrast on the plural grating lines; a CPU can reconstruct 3-D profile of DUT using optical grating imaging with fine tuning main and sub-frames. So achieved the optical grating has the same contrast to be easy to distinguish, the monitor has main- and sub-frames can be switched, and adjusting the optical grating with modified module.