Polarized light irradiation device
To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element...
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creator | SHINBORI, MASASHI GOTOH, MANABU |
description | To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta |
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Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta <= ±20 DEG corresponding to an incident angle and a wavelength of the polarized light. Consequently, the extinction ratio of the polarized light irradiating the work W is not lowered even when the polarization direction of the incident polarized light on the second plane mirror 6 is varied. Also, optionally the incident angle of the polarized light on the plane mirror is reduced by using a plurality of plane mirrors instead of the second plane mirror 6 or the difference in the phase shift Delta may be canceled by two sheets of plane mirrors.</description><language>eng</language><subject>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ; FREQUENCY-CHANGING ; NON-LINEAR OPTICS ; OPTICAL ANALOGUE/DIGITAL CONVERTERS ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICAL LOGIC ELEMENTS ; OPTICS ; PHYSICS ; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070821&DB=EPODOC&CC=TW&NR=I285751B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070821&DB=EPODOC&CC=TW&NR=I285751B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHINBORI, MASASHI</creatorcontrib><creatorcontrib>GOTOH, MANABU</creatorcontrib><title>Polarized light irradiation device</title><description>To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta <= ±20 DEG corresponding to an incident angle and a wavelength of the polarized light. Consequently, the extinction ratio of the polarized light irradiating the work W is not lowered even when the polarization direction of the incident polarized light on the second plane mirror 6 is varied. Also, optionally the incident angle of the polarized light on the plane mirror is reduced by using a plurality of plane mirrors instead of the second plane mirror 6 or the difference in the phase shift Delta may be canceled by two sheets of plane mirrors.</description><subject>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</subject><subject>FREQUENCY-CHANGING</subject><subject>NON-LINEAR OPTICS</subject><subject>OPTICAL ANALOGUE/DIGITAL CONVERTERS</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICAL LOGIC ELEMENTS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2007</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAKyM9JLMqsSk1RyMlMzyhRyCwqSkzJTCzJzM9TSEkty0xO5WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8SHhnkYWpuamhk5OxkQoAQCJZyZT</recordid><startdate>20070821</startdate><enddate>20070821</enddate><creator>SHINBORI, MASASHI</creator><creator>GOTOH, MANABU</creator><scope>EVB</scope></search><sort><creationdate>20070821</creationdate><title>Polarized light irradiation device</title><author>SHINBORI, MASASHI ; GOTOH, MANABU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TWI285751BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2007</creationdate><topic>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</topic><topic>FREQUENCY-CHANGING</topic><topic>NON-LINEAR OPTICS</topic><topic>OPTICAL ANALOGUE/DIGITAL CONVERTERS</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICAL LOGIC ELEMENTS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</topic><toplevel>online_resources</toplevel><creatorcontrib>SHINBORI, MASASHI</creatorcontrib><creatorcontrib>GOTOH, MANABU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SHINBORI, MASASHI</au><au>GOTOH, MANABU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Polarized light irradiation device</title><date>2007-08-21</date><risdate>2007</risdate><abstract>To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta <= ±20 DEG corresponding to an incident angle and a wavelength of the polarized light. Consequently, the extinction ratio of the polarized light irradiating the work W is not lowered even when the polarization direction of the incident polarized light on the second plane mirror 6 is varied. Also, optionally the incident angle of the polarized light on the plane mirror is reduced by using a plurality of plane mirrors instead of the second plane mirror 6 or the difference in the phase shift Delta may be canceled by two sheets of plane mirrors.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF |
title | Polarized light irradiation device |
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