Polarized light irradiation device

To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element...

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Hauptverfasser: SHINBORI, MASASHI, GOTOH, MANABU
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GOTOH, MANABU
description To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta
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Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta &lt;= ±20 DEG corresponding to an incident angle and a wavelength of the polarized light. Consequently, the extinction ratio of the polarized light irradiating the work W is not lowered even when the polarization direction of the incident polarized light on the second plane mirror 6 is varied. 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Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta &lt;= ±20 DEG corresponding to an incident angle and a wavelength of the polarized light. Consequently, the extinction ratio of the polarized light irradiating the work W is not lowered even when the polarization direction of the incident polarized light on the second plane mirror 6 is varied. 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subjects DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
title Polarized light irradiation device
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