Polarized light irradiation device

To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element...

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Bibliographische Detailangaben
Hauptverfasser:	SHINBORI, MASASHI, GOTOH, MANABU
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	To prevent the extinction ratio of polarized light irradiating a work from lowering even when the polarization direction of the incident polarized light on a reflection mirror is varied. Light from a lamp 1 is made incident on a polarizing element 8. Polarized light emitted by the polarizing element 8 is reflected by a second plane mirror 6 and irradiates an alignment layer of the work W via a mask M. A protective film 11 is formed on a surface of the second plane mirror 6. The kind of the protective film 11 and the optical thickness of the film is selected so as to make difference in a phase shift Delta between P polarized light component and S polarized light component emitted from the second plane mirror 6 satisfy an inequality Delta