Composition and method for temporarily fixing solid

The present invention is related to a method of temporarily fixing two solid bodies. In the invented method, two solid bodies are mutually and temporarily fixed through the use of liquid crystal compound or the composition containing liquid crystal compound. The invented method can be used in the ex...

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Bibliographische Detailangaben
Hauptverfasser:	HANAMURA, MASAAKI, YOKOYAMA, YASUAKI, BESSHO, NOBUO
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL PAINTS PERFORMING OPERATIONS POLISHES POLISHING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING USE OF MATERIALS AS ADHESIVES
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Beschreibung
Zusammenfassung:	The present invention is related to a method of temporarily fixing two solid bodies. In the invented method, two solid bodies are mutually and temporarily fixed through the use of liquid crystal compound or the composition containing liquid crystal compound. The invented method can be used in the example such as temporarily fixing method of the filler for CMP where the wafer for semiconductor device is fixed to perform the polishing process when one solid body is used as the filler for chemical mechanical polishing (CMP) of wafer for semiconductor device and the other solid body is used as the disc for fixing.