Mixed excitation micro-nozzle system

This invention relates to a mixed excitation micro-nozzle system, particularly an active or a passive excitation or mixed excitation system. The nozzle device is provided therein with a liquid storage tank containing medium to be nebulized and a passive excitation device next to the spraying port for atomizing medium to be nebulized, characterized in that: the active excitation device is arranged and constructed of plural vibrators, such that regular arrangement of the vibrators would excite even amplitudes and waves; the passive excitation device is formed of plural flowing channels spaced from each other at an equal distance, such that the equi-distant arrangement can generate continuous excitation and vibration of the medium to be nebulized to a high-frequency within the range from tens of thousands to millions of hertz, thereby generating high speed micro particles. This invention can use resonance vibrations caused by both the active excitation device or the passive excitation device to nebulize the liquid flow, thereby resulting more significant shattering effect so as to obtain even finer metal particles or liquid spray which will be suitable for the wafer packaging process, metal powder metallurgy, and micro-grade and nano-grade technology industries needed in nowadays high-tech industries.