Fluid ejection device with compressive alpha-tantalum layer

Fluid ejection device with compressive alpha-tantalum layer

A fluid ejection device (300) is disclosed. The fluid ejection device (300) may include a substrate (301) including a heating element (306) and a passivation layer (308, 310) in contact with the heating element (306). The fluid ejection device (300) may further include a buffer layer (312) in contac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: FARTASH, ARJANG
Format: Patent
Sprache:eng
Schlagworte:
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Beschreibung
Zusammenfassung:A fluid ejection device (300) is disclosed. The fluid ejection device (300) may include a substrate (301) including a heating element (306) and a passivation layer (308, 310) in contact with the heating element (306). The fluid ejection device (300) may further include a buffer layer (312) in contact with the passivation layer (308, 310) and a compressive alpha-tantalum layer (314) in contact with, and lattice matched to, the buffer layer (312).