Method of forming oxidation resistant coating on conductive structure

A method for forming an oxidation resistant coating on a conductive structure is provided. A first photo-resist is utilized to form first patterned openings. Then, a second photo-resist is filled into the first patterned openings and developed to form second patterned openings. Afterwards, an oxidat...

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Bibliographische Detailangaben

Hauptverfasser:	WEN, SHAUUO, HORNG, CHING-FU, TSENG, CHIAO, FANG, JEN-KUANG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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