Slotted substrate and method of making

The described embodiments relate to a slotted substrate (306) and methods of forming same. One exemplary method patterns a hardmask (504) on a first substrate surface (310) sufficient to expose a first area (510) of the first surface (310) and forms a slot portion (610) in the substrate (306) throug...

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Hauptverfasser: OBERT, JEFFREY S, DONALDSON, JEREMY H, TRUNINGER, MARTHA A
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creator OBERT, JEFFREY S
DONALDSON, JEREMY H
TRUNINGER, MARTHA A
description The described embodiments relate to a slotted substrate (306) and methods of forming same. One exemplary method patterns a hardmask (504) on a first substrate surface (310) sufficient to expose a first area (510) of the first surface (310) and forms a slot portion (610) in the substrate (306) through less than an entirety of the first area (510) of the first surface (310). The slot portion (610) has a cross-sectional area at the first surface (310) that is less than a cross-sectional area of the first area (510). After forming the slot portion (610), the method etches the substrate (306) to remove material from within the first area (510) to form a fluid-handling slot (304).
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subjects CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
title Slotted substrate and method of making
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