Slotted substrate and method of making

The described embodiments relate to a slotted substrate (306) and methods of forming same. One exemplary method patterns a hardmask (504) on a first substrate surface (310) sufficient to expose a first area (510) of the first surface (310) and forms a slot portion (610) in the substrate (306) throug...

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Bibliographische Detailangaben
Hauptverfasser:	OBERT, JEFFREY S, DONALDSON, JEREMY H, TRUNINGER, MARTHA A
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	The described embodiments relate to a slotted substrate (306) and methods of forming same. One exemplary method patterns a hardmask (504) on a first substrate surface (310) sufficient to expose a first area (510) of the first surface (310) and forms a slot portion (610) in the substrate (306) through less than an entirety of the first area (510) of the first surface (310). The slot portion (610) has a cross-sectional area at the first surface (310) that is less than a cross-sectional area of the first area (510). After forming the slot portion (610), the method etches the substrate (306) to remove material from within the first area (510) to form a fluid-handling slot (304).