Ion supply apparatus and method thereof
Charged particles hit an object continuously to induce more charged particles hitting the object, therefore, and being absorbed continuously. The substance of forming charged particles are able to adhere to the object. The means of solution is providing an ion supply apparatus, which includes a char...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Charged particles hit an object continuously to induce more charged particles hitting the object, therefore, and being absorbed continuously. The substance of forming charged particles are able to adhere to the object. The means of solution is providing an ion supply apparatus, which includes a charged particles producer 2 and an electric potential keeper 4. The charged particles producer 2 ejects charged particles 1 toward an object 3, and the electric potential keeper 4 holds the electric potential of the object 3 in order for the charged particles 1 to be able to induce/absorb the object 3 continuously. |
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