Method for holding substrate in vacuum, method for manufacturing liquid crystal display device, and device for holding substrate

The inventive method for holding a substrate in vacuum is provided to form an adhesive pad (20) or an adhesive sheet holding glass substrate (5) by a diene-based resin. Accordingly, it allows the prevention of adhesion of an adhesive agent to the substrate and also allows the adhesive sheet to be re...

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Bibliographische Detailangaben
Hauptverfasser: HIRAI, AKIRA+, NAKAHARA, MAKOTO, YOKOYAMA, NAOTO, MURAYAMA, TAKAO, MORIMOTO, MITSUAKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The inventive method for holding a substrate in vacuum is provided to form an adhesive pad (20) or an adhesive sheet holding glass substrate (5) by a diene-based resin. Accordingly, it allows the prevention of adhesion of an adhesive agent to the substrate and also allows the adhesive sheet to be released with ease form the substrate after the cementation thereof with another substrate.