A device for manufacturing a thin silicon board and a manufacturing method thereof

The subject invention provides a device for manufacturing a thin silicon board and a manufacturing method thereof, which the manufacturing cost is cheaper than that of the prior art. The device comprises a soaking mechanism for forming thin board, which is made from molten material (3), on the surfa...

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Bibliographische Detailangaben
Hauptverfasser: YANO, KOZABURO, GOKAKU, HIROZUMI, GOMA, SHUJI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The subject invention provides a device for manufacturing a thin silicon board and a manufacturing method thereof, which the manufacturing cost is cheaper than that of the prior art. The device comprises a soaking mechanism for forming thin board, which is made from molten material (3), on the surface of bottom layers (C1, C2) by soaking the bottom layers in said molten material, setting up and removing the bottom layers at a bottom layer changing position. The device further comprises a plurality of systems of the soaking mechanisms (103, 203) having approximately the same structure, respectively. The soaking mechanisms of plurality of systems are positioned by the way which the movement for changing the bottom layers in one soaking mechanism will not be interfered by the movement for changing the bottom layers in another.