Illumination system with reduced energy loading

The present invention is to provide an illumination system in which the energy load on an objective is reduced in the interior of the objective. The illumination system contains a rod type integrator and a succeeding objective lens. The rod type integrator is provided with an entry surface, an exit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SOHMER, ALEXANDER, KOHLER, JESS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present invention is to provide an illumination system in which the energy load on an objective is reduced in the interior of the objective. The illumination system contains a rod type integrator and a succeeding objective lens. The rod type integrator is provided with an entry surface, an exit surface and a reflecting side surface. The objective is provided with a lens-free interspace at least 30 mm thick (dLF) in the axial direction. The level is present in the interior of this interspace. The level is optically conjugated with the level of the entry surface. All beams which are emitted from the central field in the interior of the entry surface of the rod type integrator and not reflected on the side surface has lower heights with respect to the optical axis (OA) than that of a beams which are emitted from the same central field in the lens-free interspace and reflected from the side surface.