Micro/nano-meter optical grating manufacturing method

This invention relates to a micro/nano-meter optical grating manufacturing method, which includes steps of using insulation material to form channels on a substrate alternatively forming many inlets on the front ends of the channels, providing etchant and spacer liquid to alternatively fill in these...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TING, YUNGIANG, SHY, SHYI-LONG
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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