Micro/nano-meter optical grating manufacturing method
This invention relates to a micro/nano-meter optical grating manufacturing method, which includes steps of using insulation material to form channels on a substrate alternatively forming many inlets on the front ends of the channels, providing etchant and spacer liquid to alternatively fill in these...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | This invention relates to a micro/nano-meter optical grating manufacturing method, which includes steps of using insulation material to form channels on a substrate alternatively forming many inlets on the front ends of the channels, providing etchant and spacer liquid to alternatively fill in these inlets and controlling these liquids' Reynold numbers to be less than 2100. By the property of laminar flow, the etchant and the spacer liquid are not mutually mixed such that the etchant on each layer etches to form optical grating on the substrate. |
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